Reliability improvement in Al metallization: a combination of statistical prediction and failure analytical methodology

G. Zhang, C. M. Tan, K. T. Tan, K. Y. Sim, and W. Y. Zhang. “Reliability improvement in Al metallization: a combination of statistical prediction and failure analytical methodology,” Microelectronics Reliability, vol. 44, no. 9-11, pp. 1843-1848, 2004.
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