RF Performance of in-situ SiNx Gate Dielectric AlGaN/GaN MISHEMT on 6-inch Silicon-on-Insulator (SOI) Substrate

H.-C. Chiu, H.-Y. Wang, L.-Y. Peng, H.-C. Wan, H.-L. Kao, C.-W. Hu, and R. Xua, “RF Performance of in-situ SiNx Gate Dielectric AlGaN/GaN MISHEMT on 6-inch Silicon-on-Insulator (SOI) Substrate,” IEEE Trans. Electron Device, vol.64, Issue 10, 2017, pp. 4065-4070. 2017/10/1