Reliability improvement in Al metallization: a combination of statistical prediction and failure analytical methodology

G. Zhang, C. M. Tan, K. T. Tan, K. Y. Sim, and W. Y. Zhang. “Reliability improvement in Al metallization: a combination of statistical prediction and failure analytical methodology,” in European Symp. on Reliability of Electron Devices, Failure physics and analysis, 2004, pp. 1843-1848.