Backside copper contamination issues in CMOS integrated circuits
K. Prasad, D. H. Zhang, C. M. Tan. “Backside copper contamination issues in CMOS integrated circuits,” in Int. workshop on physics of semiconductor devices, 2001.
K. Prasad, D. H. Zhang, C. M. Tan. “Backside copper contamination issues in CMOS integrated circuits,” in Int. workshop on physics of semiconductor devices, 2001.
