An environmentally friendly etching agent: vapor from hot electron-activated liquid water.

Chen, H.C.; Mai, F.D.; Yang, K.H.; Tsai, H.Y.; Yang, C.P.; Chen, C.C.; Chen, C.H.; Liu, Y.C.* An environmentally friendly etching agent: vapor from hot electron-activated liquid water. Green Chemistry 2016, 18, 3098. 2016/2/8