Aligned carbon nanotubes for through-wafer interconnects

T. Xu, Z. Wang, J. Miao, X. Chen, and C. M. Tan. “Aligned carbon nanotubes for through-wafer interconnects,” Applied Physics Letters, vol. 91, no. 4, pp. 042108, 2007
https://aip.scitation.org/doi/full/10.1063/1.2759989